Mitutoyo M Plan Apo 100x Objective (NA 0.70, WD 6mm, Infinity, M26)

In stock

SKU: 378-806-3

Regular price $3,995.00
The Mitutoyo M Plan Apo 100× Objective is a premium plan apochromat objective from Mitutoyo’s M Plan Apo series — delivering high-magnification 100× imaging with an exceptional 6mm working distance and plan apochromat correction optimized for visible light. With 6mm of working clearance at 100× — 30–60× greater than standard 100× objectives — this objective enables high-magnification inspection of specimens in fixtures, chambers, and environments where standard objectives cannot reach.

KEY FEATURES

  • Long working distance: 6mm — extraordinary clearance for a 100× objective (standard 100× objectives offer 0.1–0.2mm WD), providing 30–60× more clearance for specimens in environmental chambers, cryostats, vacuum systems, industrial fixtures, and laser processing setups where standard objectives are physically incompatible
  • NA 0.70, 0.7µm resolving power — high numerical aperture for a long working distance objective, delivering sub-micron resolution for detailed semiconductor inspection, surface analysis, and high-magnification industrial imaging
  • Plan apochromat (M Plan Apo) correction — Mitutoyo’s highest level of chromatic and spherical aberration correction for accurate, flat-field imaging across the full visible spectrum at 100×
  • Visible light optimized — the standard visible-light version of the M Plan Apo 100×; for NIR/SWIR applications (silicon wafer through-inspection, Raman spectroscopy, NIR laser), see the M Plan Apo NIR 100× (378-826-15)
  • Infinity-corrected, M26 thread — compatible with Mitutoyo FS series microscopes and other infinity-corrected systems with M26 nosepieces
  • 🇯🇵 Mitutoyo quality, made in Japan — precision optical construction for consistent, high-efficiency visible light transmission and long service life
  • Catalog number 378-806-3
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Product Overview

The Mitutoyo M Plan Apo 100× (378-806-3) is the visible-light version of Mitutoyo’s flagship 100× plan apochromat objective — combining 100× magnification, plan apochromat correction, and a 6mm working distance that is 30–60× greater than standard 100× objectives. The 6mm working distance solves one of the most challenging problems in high-magnification microscopy: how to achieve 100× magnification when the specimen cannot be brought within 0.2mm of the objective front element. This enables high-magnification inspection of specimens in environmental chambers, cryostats, vacuum systems, industrial fixtures, and laser processing setups where standard 100× objectives are physically incompatible. The plan apochromat correction ensures flat-field imaging with accurate chromatic registration across the full visible spectrum, essential for accurate defect documentation and color-based analysis at 100×. At NA 0.70 with 0.7µm resolving power, this objective delivers sub-micron resolution for the most demanding visible-light inspection applications. The dry (air) design eliminates the need for immersion media, making it practical for use in industrial and semiconductor environments. For applications requiring NIR or SWIR transmission (silicon wafer backside inspection, Raman spectroscopy, NIR laser delivery), see the M Plan Apo NIR 100× (378-826-15). Compatible with Mitutoyo FS series microscopes and other infinity-corrected systems with M26 thread nosepieces. Catalog number 378-806-3.

Technical Specifications

Catalog Number 378-806-3
Magnification 100×
Numerical Aperture (NA) 0.70
Immersion Medium Dry (air)
Working Distance 6mm (Long Working Distance)
Spectral Range Visible light
Resolving Power 0.7µm
Focal Depth 0.6µm
Focal Length 2mm
Field of View (Ø24 eyepiece) Ø0.24mm
Real FOV (1/2" chip camera) 0.05 × 0.06mm
Optical Design M Plan Apo (Plan Apochromat, visible light)
Correction Infinity-corrected (brightfield)
Thread / Mount M26
Compatible Systems Mitutoyo FS series; other infinity-corrected M26 systems
Country of Origin Japan
SKU 378-806-3

Microscope Compatibility

Typical Applications

High-magnification semiconductor and IC surface inspection at 100× in visible light
Defect analysis and documentation on polished surfaces, thin films, and coatings
High-magnification imaging in environmental chambers, cryostats, or vacuum systems
Inspection of specimens in industrial fixtures or assemblies requiring 6mm clearance
Laser processing and micro-machining requiring simultaneous visible-light imaging at 100×
Any application requiring 100× magnification where standard working distance is insufficient
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